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A shielded cantilever-tip microwave probe for micro/nano surface imaging of conductive properties

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7 Author(s)
Yang, Y.L. ; Shanghai Inst. of Microsyst. & Inf. Technol., Chinese Acad. of Sci., Shanghai, China ; Lai, K.J. ; Tang, Q.C. ; Kundhikanjana, W.
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This paper reports an electromagnetic shielded cantilever-tip microwave-probe for conductive-property imaging at micro/nano surface-area. Equipped with an ultra-sharp tip apex (<;50 nm), the probe features small conducting path resistance of Rs<;5Ω and conducting path-to ground capacitance of Ctip≈1pF. These optimal-designed parameters facilitate satisfactory spatial resolution and microwave-signal intensity during probing test. The fabrication method is low-cost and suitable for batch-fabrication.

Published in:

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Date of Conference:

23-27 Jan. 2011