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The following topics are dealt with: microelectromechanical system; optical MEMS; medical MEMS; assembly; diagnostics; lab-on-a-chip; carbon nanotube; flexible substrate; power; piezos; RF MEMS; resonator; cells; molecules; fabrication technology; packaging technology; mechanical sensor; physical MEMS; biosensor; chemical microsensor; medical microsystem; microfluidic component; microfluidic system; microactuator; energy harvesting; power MEMS; nanoelectromechanical device; and nanoelectromechanical system.

Published in:

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Date of Conference:

23-27 Jan. 2011