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CMOS-MEMS 3-bit Digital Capacitors With Tuning Ratios Greater Than 60:1

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3 Author(s)
Reinke, J. ; Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA ; Fedder, G.K. ; Mukherjee, T.

3-bit microelectromechanical systems digital capacitors with greater than 60:1 tuning ratios are monolithically integrated with CMOS using a post-CMOS fabrication process. The digital capacitors are composed of many switched capacitors in parallel, which use a combination of vertical (out-of-plane) electrothermal actuation and lateral (in-plane) electrostatic actuation to toggle their capacitance value. Measured results demonstrate quality factors greater than 150 at 1 GHz and electrical self-resonant frequencies beyond 10 GHz. The capacitors can be switched in less than 1 ms with 4 V for electrothermal actuation and 20 V for electrostatic actuation. The effects of repeated actuation are presented to assess the reliability of the digital capacitors.

Published in:

Microwave Theory and Techniques, IEEE Transactions on  (Volume:59 ,  Issue: 5 )

Date of Publication:

May 2011

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