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High Precision Electrohydrodynamic Printing of Polymer Onto Microcantilever Sensors

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9 Author(s)
Pikul, J.H. ; Dept. of Mech. Sci. & Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA ; Graf, P. ; Mishra, S. ; Barton, K.
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We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.

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Sensors Journal, IEEE  (Volume:11 ,  Issue: 10 )