Referenced Items are not available for this document.
To stay competitive, semiconductor manufacturers have come to acknowledge maintenance as an essential strategic element in manufacturing process planning. Condition-based maintenance (CBM) allows the maintenance strategy to be customised based on the equipment type and its failure pattern. Traditional CBM uses simple control charts, thus limiting its application to simple systems. This paper proposes the use of Data-driven CBM as a maintenance strategy for equipment in a semiconductor mass production environment.
Published in:
Electronic Design, Test and Application (DELTA), 2011 Sixth IEEE International Symposium on
Date of Conference: 17-19 Jan. 2011
- Page(s):
- 189 - 194
- Print ISBN:
- 978-1-4244-9357-9
- INSPEC Accession Number:
- 11874034
- Conference Location :
- Queenstown
- Digital Object Identifier :
- 10.1109/DELTA.2011.42
- Product Type:
- Conference Publications
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