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Temporally Resolved Imaging of Jet-Type Dielectric Barrier Discharge Using He and Ar/Acetone Crossed Gas Flows

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4 Author(s)
Urabe, K. ; Dept. of Electron. Sci. & Eng., Kyoto Univ., Kyoto, Japan ; Sands, B.L. ; Sakai, Osamu ; Ganguly, B.N.

We report on temporally resolved images in a jet-type dielectric barrier discharge with two crossed gas flows obtained by a spectrally filtered intensified charge-coupled device (ICCD) camera. The crossed-flow configuration of He and Ar gases and a small acetone impurity added into the Ar flow simulated a discharge configuration and an organic precursor used for the practical application of material processing, respectively. From the ICCD images, streamer and transient glow discharges could be distinguished between the electrode and the substrate. Filtered emission from excited N2+, CH, C2, He, and Ar also revealed the excitation and decomposition processes in the discharge.

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Plasma Science, IEEE Transactions on  (Volume:39 ,  Issue: 11 )