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Superconducting Y123 thin films with (001), (100/010) and (103/110) orientations were obtained by molecular-organic-source MBE (MOMBE) for optimum growth temperatures of 600, 515 and 600°C, respectively, using a Ba(DPM)2(phen)2 source material and ozone atmosphere. Superconductivity was obtained without post processing. According to the literature, use of a Ba(DPM)2(phen)2 precursor was expected to yield a lower optimum growth temperature, but there were no significant differences between the use of this source and a Ba(DPM)2 precursor. For our c-axis oriented Y123 film, the optimum growth temperature was higher than the reported record-low growth temperature (500 °C by MOCVD using Ba(DPM)2(phen)2 ) but it was lower than the values for other growth techniques. This can have a positive impact on fabrication of layered devices or integration through the decrease of inter-diffusion between the layers. Results also suggest that processes are complex and other details than the source type should be carefully considered.
Date of Publication: June 2011