Low Offset, Low Noise, Variable Gain Interfacing Circuit with a Novel Scheme for Sensor Sensitivity and Offset Compensation for MEMS Based, Wheatstone Bridge Type, Resistive Smart Sensor

A fully-analog, on-chip, low input offset, low noise, variable gain instrumentation amplifier with a new scheme for nonlinear and dynamic temperature compensation of sensor sensitivity and offset, is designed in 0.18μm commercial CMOS process. The system has a scalable system bandwidth up to 5kHz, a dynamic range of 84dB, and a maximum gain of 104dB. All the sensor non idealities and CMOS process mismatch have been incorporated in simulation. Using this interfacing circuit, a smart MEMS piezoresistive accelerometer has been designed subsequently.