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The stability of the figures of merit of transparent inverter circuits at temperatures up to 150°C and under illumination by light in the visible spectral range is investigated. The inverter circuits consist of two transparent metal-semiconductor field-effect transistors. For temperatures up to 150°C, the inverters remain operational; the gate electrode degradation affects the voltage transfer characteristic (VTC) for temperatures above 90°C. Except for blue light, which slightly alters the VTC, visible light does not influence the device operation.