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A laser-activated MEMS transducer for efficient generation of narrowband longitudinal ultrasonic waves

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4 Author(s)
Xuesheng Chen ; Electr. Syst. & Opt. Res. Div., Univ. of Nottingham, Nottingham, UK ; Stratoudaki, T. ; Sharples, S.D. ; Clark, M.

In this paper, we demonstrate an optically powered microelectromechanical system (MEMS) transducer. It was designed and fabricated using MEMS techniques, and can generate narrowband ultrasonic bulk waves from a broadband laser excitation pulse with high efficiency. The transducer is a two-mask-level MEMS device with a microdisk seated on a microsystem. When a laser pulse is incident on the disk center, a resonant flapping motion of the disk is actuated because of the thermomechanical interaction between the absorbing and non-absorbing parts of the disk, coupling a narrowband longitudinal bulk wave propagating along the axis of the stem into the sample. Finite element (FE) methods were used to simulate the generated ultrasound; the results agree well with experimental measurements. Experiments with the fabricated transducers have shown that narrowband ultrasound with a high SNR/amplitude was generated successfully; compared with normal thermoelastic generation, ultrasound with at least 5 times higher amplitude can be achieved by an optimized MEMS transducer. The transducer is inexpensive, compact, and simple to use.

Published in:

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:58 ,  Issue: 2 )

Date of Publication:

February 2011

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