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Method and system for determining optimal wafer sampling in real-time inline monitoring and experimental design

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2 Author(s)
Susan Sun ; Micron Technology Inc, Manassas, VA 20110, USA ; Johnson, Kari

This paper describes a method and system based on weighted objectives to determine optimal wafer sampling for maximum coverage of the various process scenarios combined with coverage of each treatment of a designed experiment. It also uses a scalable technique to ensure global optimization instead of local optimization.

Published in:
Semiconductor Manufacturing (ISSM), 2008 International Symposium on

Date of Conference: 27-29 Oct. 2008

Page(s):
44 - 47
ISSN :
1523-553X
E-ISBN :
978-4-9904138-2-8
Conference Location :
Tokyo, Japan
Product Type:
Conference Publications

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