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Highly collimated electron beams from double-gate field emitter arrays with large collimation gate apertures

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7 Author(s)
Helfenstein, P. ; Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, CH-5232 Villigen-PSI, Switzerland ; Kirk, E. ; Jefimovs, K. ; Vogel, T.
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Electron collimation in field emitter arrays with electron extraction gate and collimation gate electrodes is studied with the goal to develop a high-brightness high current cathode. Using metallic field emitter arrays prepared by the molding method, we fabricated a stacked double-gate device with the two gates differing in diameter by a process utilizing focused-ion beam milling. We measured the field-emission beam characteristics and demonstrated a reduction of the emission angle by a factor of 7.1±0.8 with minimal emission current decrease under collimating conditions, resulting in a current density increase by a factor of 13.9±1.0.

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Applied Physics Letters  (Volume:98 ,  Issue: 6 )