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Fabrication and Response of Laser-Printed Cavity-Sealing Membranes

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4 Author(s)
Birnbaum, A.J. ; Mater. Sci. & Technol. Div., Naval Res. Lab., Washington, DC, USA ; Zalalutdinov, M.K. ; Wahl, K.J. ; Piqué, A.

Freestanding micrometer-scale Ag membranes were laser printed via the laser decal transfer process without the use of sacrificial layers. Cross-sectional focused ion beam milling revealed uniform membrane thickness. Material and structural properties, including Young's modulus E ≈ 40 GPa, residual stress σ0 ≈ 61 MPa, and yield stress σy ≈ 110 MPa, were extracted via a coupled nanoindentation/flnite-element simulation approach. Dynamic characterization of membranes via laser vibrometry confirmed resonant frequencies in the megahertz regime with quality factors comparable to fully dense structures fabricated via traditional lithography.

Published in:

Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 2 )