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The pneumatic actuator is widely used in industrial applications due to its reliability, low cost and no overheat problem in an industrial servo system. Recently, the development of control technology is improving and the requirement for control precision gets higher than before. In order to accomplish accurately control performance, nonlinear control techniques are implemented on control system. This paper presents a new form of backstepping sliding mode controller for X-Y table motion system. Experimental results are presented to show that the proposed controller can accomplish accurate tracking circle trajectory performance.