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Design of a SAW-based sensor combined with a micro-hotplate for biological applications

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2 Author(s)
Lahijani, B.V. ; Fac. of Electr. Eng., Sahand Univ. of Technol., Tabriz, Iran ; Ghavifekr, H.B.

A SAW-based sensor for chemical and biological application is designed in this paper. An Aluminum nitride piezoelectric layer is used over a bulk micromachined silicon substrate, so the design is compatible with CMOS Process. An additional micro-hotplate is integrated on system for thermal adjustment of sensing layer on required temperature and thermal stabilization of whole sensor. The SAW device with a working frequency of 610 MHz is built over a 21μm membrane. The frequency response and sensing property of the sensor are achieved via finite element analysis. The temperature distribution of the micro-hotplate is demonstrated.

Published in:

Biomedical Engineering (ICBME), 2010 17th Iranian Conference of

Date of Conference:

3-4 Nov. 2010