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It is found out that using reverse coupled inductors could effectively improve power density and dynamic performance of multiphase interleaved point of load converters. Thus, it is of great significance to conduct a research about design and fabrication of ultrathin coupled inductors for system 3-D integration. The aim of this paper is to explore the structures, modeling, and fabrication of ultrathin coupled inductors based on low-temperature cofired ceramic (LTCC) technology. Four structures classified by shapes and relative positions of windings are introduced and compared. Simple but effective analytic models are set up to calculate self-inductance, leakage inductance, and coupling coefficient for quick design, and a design guideline is summarized according to the models. We made a 1.3-mm-thick LTCC coupled inductor and two competing coil coupled inductors, and compared their characteristics and performance. They are tested in a 12-V input and 1.2-V/40-A output two-phase interleaved buck converter at three different switching frequencies. Core loss and winding loss of the inductors are quantified by simulation. Compared with conventional coil coupled inductors, the LTCC coupled inductor has higher power density and light load efficiency. Besides, it could also help to improve the transient performance of converters for its higher coupling coefficient.