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This paper presents modeling and measurement of low voltage electrostatic discharge (ESD) from power/ground (P/G) planes. The P/G plane in charging part and a line in discharging part are modeled as equivalent circuits for analysis of ESD current waveform. The test vehicles are fabricated on multilayer printed circuit boards (PCBs). The ESD modeling of low voltage charged power/ground plane is verified through measurements. We also investigate the effects of decoupling capacitors on ESD of P/G plane.