Notification:
We are currently experiencing intermittent issues impacting performance. We apologize for the inconvenience.
By Topic

Design and simulation of ultra high sensitive piezoresistive MEMS sensor with structured membrane for low pressure applications

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Mackowiak, P. ; Microsensor & Actuator Technol. (MAT), Tech. Univ. of Berlin, Berlin, Germany ; Schiffer, M. ; Xin Xu ; Obermeier, E.
more authors

In order to increase the sensitivity of a piezoresistive pressure sensor, the membrane needs to be very thin or very large to achieve good results. But there is a trade-off between stability, linearity and sensitivity. The thinner the membrane, the more instable is the sensor structure. The original sensor developed for wall pressure measurement has a membrane thickness of 4 μm. The herein presented idea is to use partly-structured thicker membranes to improve the sensor performance. In this paper we show the optimization of the new sensor structure by using DoE (Design of Experiment) and FEA with ANSYS software. Due to the optimized membrane structure, the sensor sensitivity could be increased up to 300% in comparison to sensors using unstructured silicon membranes.

Published in:

Electronics Packaging Technology Conference (EPTC), 2010 12th

Date of Conference:

8-10 Dec. 2010