By Topic

Analysis of leakage current mechanisms in RuO2TiO2RuO2 MIM structures

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

10 Author(s)
Racko, J. ; Slovak University of Technology, Ilkovičova 3, 812 19 Bratislava, Slovakia ; Mikolasek, M. ; Harmatha, L. ; Breza, J.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link: 

We present an advanced model of current transport in MIM structures and demonstrate its possible utilization in analyzing the leakage current in RuO2TiO2RuO2 metal-insulator-metal structures. The model comprehends an important role of traps present in high-κ materials in the transport of carriers through the insulator and can provide information about their spatial and energy distribution in the insulator. Through numerical analysis, a significant decrease of defects density in RuO2TiO2RuO2 MIM structures was identified after annealing at 300 °C.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:29 ,  Issue: 1 )