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Hydrogen sensor based on Schottky barriers of Pd/GeO2 using a low cost electrochemically deposited thin GeO2 film

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3 Author(s)
M. J. Jawad ; School of Physics, Universiti Sains Malaysia, 11800-Penang, Malaysia ; M. R Hashim ; N K Ali

Conductometric semi-conducting metal oxide gas sensors have been widely used and investigated in the detection of gases. They have attracted much attention in the field of gas sensing under atmospheric conditions due to their low cost and flexibility in production, simplicity of their use, and large number of detectable gases. One of such materials is (GeO2) [1]. In this work, we present a method of synthesis of sub micro-sized germanium dioxide (GeO2) on porous silicon (PS) by electrochemical deposition. An n-type Si (100) wafer was used to fabricate (PS) where PS was electrochemically anodized in HF based electrolyte, at current density of 50 mA/cm2 for 30 min. In the mean time pure GeO2 is produced through hydrolization of GeCl4 by hydrogen peroxide and then electrochemically deposited on PS. Palladium (Pd) is deposited on the GeO2 /PS using RF sputtering technique to produce Schottky contact. The grown GeO2 crystals were characterized using SEM, EDX, (Fig. 1). Corresponding I-V (Fig. 2) characteristics of the Schottky diodes were measured for different flow rates of hydrogen gas. Thermionic emission model was used to analysis I-V data. The barrier height could be seen to increase significantly with hydrogen flow rate. Sensitivity and response time of the sensor will be discussed.

Published in:

Enabling Science and Nanotechnology (ESciNano), 2010 International Conference on

Date of Conference:

1-3 Dec. 2010