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Electroplating of Sn-2.5Ag solders as 20 μm pitch micro-bumps

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5 Author(s)
Kuan-Chieh Huang ; Dept. of Mater. Sci. & Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan ; Jing-Yu Chen ; Ho-Cheng Tsai ; Chien-Lung Lai
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A Cu/Ni UBM and Sn-2.5Ag lead-free solder for 20 μm pitch micro-bump was successfully fabricated via consecutive electroplatings of Cu, Ni, and binary SnAg. Materials characterizations such as Scanning Electron Microscopy (SEM), X-ray Diffraction (XRD), Electron Probe Micro-analyzer (EPMA), and X-ay Photoelectron Spectroscopy (XPS) were carried out to obtain relevant materials properties. We observed a strong effect of the plating current density on the resulting bump morphologies. After reflow, the solder revealed a spherical shape with a composition variation within 0.2 wt%.

Published in:
Microsystems Packaging Assembly and Circuits Technology Conference (IMPACT), 2010 5th International

Date of Conference: 20-22 Oct. 2010

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