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Heterogeneous integration for optical MEMS

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7 Author(s)
Fischer, A. ; Microsyst. Technol. Lab., KTH-R. Inst. of Technol., Stockholm, Sweden ; Forsberg, F. ; Lapisa, M.A. ; Roxhed, N.
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In this paper we present different large-scale heterogeneous integration technologies for optical MEMS that enable the integration of optical MEMS with standard CMOS-based ICs. Examples that are presented include various mono-crystalline silicon micro-mirror arrays and infrared bolometer arrays.

Published in:

IEEE Photonics Society, 2010 23rd Annual Meeting of the

Date of Conference:

7-11 Nov. 2010