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Optomechanical transduction of a cantilever probe using a high-Q Si microdisk cavity

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5 Author(s)
Kartik Srinivasan ; Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, MD 20899-6203, USA ; Houxun Miao ; Matthew T. Rakher ; Marcelo Davanço
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Optomechanical transduction of a silicon cantilever probe intended for atomic force microscopy applications is achieved through gradient force coupling to a high quality factor microdisk cavity, with an estimated displacement sensitivity of ≈3×10-15 m/√(Hz).

Published in:

2010 IEEE Photinic Society's 23rd Annual Meeting

Date of Conference:

7-11 Nov. 2010