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An analysis method is presented for noncontact metrology for inversion charge carrier mobility. It is based on determining the sheet resistance of the inversion charge carriers by charge spreading metrology. To calculate the mobility, the amount of inversion charge carriers must be accurately known. A method is evaluated based on the increment of the sheet conductance in function of the corona charge.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (Volume:29 , Issue: 1 )
Date of Publication: Jan 2011