Cart (Loading....) | Create Account
Close category search window

Development and optimization of a novel 3-DOF precision flexure stage

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Kim, Hyo-Young ; Mech. Eng. Dept., KAIST, Daejeon, South Korea ; Ahn, Da-Hoon ; Byung-Seon Chun ; Gweon, Dae-Gab

This article presents a novel concept design and optimal design of an ultra-precision XYθz flexure and PZT stage with nanometer accuracy. The stage consists of a regular triangle monolithic flexure mechanism with three piezoelectric actuators, and the stage uses a parallel mechanism. Since the relationship between the variables of the hinge parameters and system performances are complicated, it is very difficult to set design variables manually. Therefore, optimal design is used. Using the optimal design results, a FEM simulation was performed. The stage was designed to simultaneously attain ±50 μm in the X and Y directions and ±0.025° in the yaw direction, and have a first resonant frequency of 207 Hz in the yaw direction. The main purpose of this novel stage is to design appropriate measurement equipment; for biological specimens in particular, the stage was designed as a hollow type and with a compact size (330 mm × 330 mm × 50 mm).

Published in:

Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on

Date of Conference:

17-20 Aug. 2010

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.