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Enhanced light extraction of GaN-based LEDs with various shape and geometric lattice photonic crystal structures

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6 Author(s)
Sang Hyun Jung ; Nano Process Div., Korea Adv. Nano Fab. Center, Suwon, South Korea ; Ho Kwan Kang ; Dae Hoon Kang ; Kisoo Shin
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Photonic crystal structures with different shape air holes including triangles, squares, and circles were fabricated on top of blue GaN-based light emitting diodes using electron beam lithography and inductively coupled dry etching processes. Light extraction dependence of the patterned LEDs on shape and geometrical symmetry of two-dimensional photonic crystal structures was demonstrated. Cathodoluminescence studies reveal that the LED with a hexagonal lattice photonic crystal structure of the square air holes shows about 5-fold enhancement of luminescence intensity compared to sample without photonic crystal structure.

Published in:

Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on

Date of Conference:

17-20 Aug. 2010