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MEMS gyroscope control system using a band-pass continuous-time sigma-delta modulator

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5 Author(s)
Haitao Ding ; Inst. of Microelectron., Peking Univ., Beijing, China ; Zhenchuan Yang ; Guizhen Yan ; Kraft, M.
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This paper presents a MEMS gyroscope control system based on a band-pass continuous-time sigma-delta modulator (ΣΔM). Compared with a low-pass discrete-time based solution, it enables a circuit implementation at a much reduced sampling frequency; therefore can be easily implemented in hardware using standard off-the-shelf electronic components. System level simulations using Simulink show the proposed sixth order electromechanical ΣΔM can achieve a high SNR of 100 dB at a full scale input signal of 200°/s. Measurement of the power spectral density of the output bitstream reveals a noise floor of -90dBV/Hz1/2. The prototype is tested on a rate table with an angular signal, verifying that the principle of the approach using an electro mechanical band-pass ΣΔM control system for a MEMS gyroscope.

Published in:

Sensors, 2010 IEEE

Date of Conference:

1-4 Nov. 2010