By Topic

Integration of thin-film ZnO strain sensors into hard disk drives

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Sarah Felix ; University of California, Berkeleym 94720, USA ; Jianbin Nie ; Roberto Horowitz

This work developed a novel application of piezo electric thin-film sensing technology by incorporating ZnO strain sensors into a hard disk drive (HDD) to support the high-bandwidth, nanometer-level positioning required to achieve terabit-per-square-inch data densities. First, ZnO sensors were fabricated directly onto a HDD suspension component, which was a unique and challenging process since the substrate was made of steel. The instrumented suspension was then incorporated into an experimental HDD, along with a miniaturized instrumentation circuit and PZT actuation elements. The sensors demonstrated excellent sensitivity to structural vibration modes that contribute to displacement in the off-track direction. A simple active mode damping controller was implemented on these instrumented PZT-actuated prototypes to demonstrate suppression of high frequency vibration modes.

Published in:

Sensors, 2010 IEEE

Date of Conference:

1-4 Nov. 2010