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Modeling and characterization of a MEMS G-sensor with anti-stiction raised strips for vibration monitoring systems

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5 Author(s)
Zhuoqing Yang ; Inst. of Micro/Nano Sci. & Technol., Shanghai Jiao Tong Univ., Shanghai, China ; Guifu Ding ; Hui Shen ; Hong Wang
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A MEMS G-sensor has been fabricated by surface micromachining process. In order to prevent the stiction between the movable proof mass and the substrate some rectangular raised strips were introduced. A new analytical method has been proposed to evaluate the squeeze film damping of the device with anti-stiction raised strips. Based on this calculated squeeze film damping, modeling of the G-sensor was also completed for simulating its dynamic response by MATLAB/Simulink®. The MEMS G-sensor was packaged and then integrated to a PCB for vibration monitoring systems. Corresponding shock test has been done to characterize dynamic properties of the sensor, such as the threshold acceleration, the response time and the duration contact time, etc. Obtained results are in accordance with simulated ones.

Published in:

Sensors, 2010 IEEE

Date of Conference:

1-4 Nov. 2010

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