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We present a modeling approach for the efficient full system design of MEMS. Our methodology is based on a hierarchical approach, which allows the derivation of predictive system-level models. This procedure starts with high-fidelity continuous-field simulations to determine all model parameters and their dependencies on external impacts followed by a proper experimental calibration of the models in order to adjust the deviations caused by manufacturing-induced fluctuations. In a second step, the physically-based high-level transducer model is connected to a FPGA board, on which the corresponding control algorithms are implemented. The advantage of these hardware/software co-simulations compared to "pure" simulations is a more realistic estimation of the overall performance of the control circuitry and its interplay with the transducer, even before it is realized in hardware. This allows for modifications and optimization of both, the control circuit and the transducer design, in a very early stage of the design process.