By Topic

Displacment amplification and latching mechanism using V-shape actuators in design of electro-thermal MEMS switches

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Khazaai, J.J. ; Dept. of Electr. & Comput. Eng., Oakland Univ., Rochester, OK, USA ; Haris, M. ; Hongwei Qu ; Slicker, J.

This paper reports two unique mechanisms using "V-shape" electro-thermal actuators to realize large displacement and reliable contact in MEMS switches. The first mechanism is a novel displacement amplification system that enables a large in-plane traveling distance for closing the gap between switch contacts. The structure features a movable end and pivot joints connecting to the amplification beam that can result in smaller actuating force distinguishing this mechanism from others. The second mechanism involves a unique latching system to provide a large lateral force for reliable contact. In both mechanisms, out-of-plane displacements are minimized due to the structural symmetry of the "V-shape" actuators. The devices are fabricated using PolyMUMPS process. At 1 V driving voltage for 2 pairs of 3-arm V-shape actuators, the displacement amplification system provides a gain of ~6.5 while consuming 2×3.8 mW power. Each 4-arm V-shape latching actuator generates ~2.7 μm displacement and ~240 μN contact force with a power consumption of ~2.2 mW.

Published in:

Sensors, 2010 IEEE

Date of Conference:

1-4 Nov. 2010