By Topic

CMOS-integrated stress sensor systems

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
P. Ruther ; Department of Microsystems Engineering (IMTEK), University of Freiburg, Germany ; M. Baumann ; P. Gieschke ; M. Herrmann
more authors

Sensor systems based on piezoresistors have found a wide variety of applications whenever mechanical stress due to external mechanical input is to be determined. Such sensor elements are fabricated using commercial CMOS processes enabling the realization of highly integrated systems with electronics for signal amplification and multiplexing. They combine stress-sensing elements such as Wheatstone bridges, 4- and 8-terminal well-based devices, or 4-contact piezoresistive field effect transistors, i.e. piezo-FETs. In addition, innovative devices generating out-of-plane current components are applied to determine out-of-plane stress components. The paper discusses the sensing elements, the system architecture and the post-CMOS fabrication processes required to realize the CMOS-integrated stress sensor systems. Smart orthodontic brackets and a stress sensing neural probe are discussed in more detail.

Published in:

Sensors, 2010 IEEE

Date of Conference:

1-4 Nov. 2010