Cart (Loading....) | Create Account
Close category search window
 

Simultaneous Layout Migration and Decomposition for Double Patterning Technology

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Chin-Hsiung Hsu ; Grad. Inst. of Electron. Eng., Nat. Taiwan Univ., Taipei, Taiwan ; Yao-Wen Chang ; Nassif, S.R.

Double patterning technology (DPT) and layout migration (LM) are two closely related problems on design for manufacturability in the nanometer era. DPT decomposes a layout into two masks and applies double exposure patterning to increase pitch size and, thus, printability. In this paper, we present the first algorithm in the literature for the simultaneous layout migration and decomposition (SMD) problem. Our algorithm first constructs a potential conflict graph and DPT-aware constraint graphs, and then applies integer linear programming (ILP) corresponding to the graphs to obtain a decomposed and migrated layout. We further present an effective graph-based reduction technique to prune the ILP solution space, which maintains the same DPT conflicts. We also present a new DPT-aware objective for the SMD problem to minimize the difference between the original and migrated layouts while considering the DPT effects. In addition, we present an approach to generate DPT-aware standard cells by considering the DPT effects on the cell boundaries; this technique improves the layout printability and facilitates electronic design automation tools to consider DPT. Experimental results show that our algorithms can effectively generate conflict-free migrated layouts with 11% smaller layout areas and 21% smaller layout changes, compared with the traditional method of layout decomposition followed by LM. In particular, our reduction technique reduces the ILP variables by 45.7%, the ILP constraints by 58.5%, and the DPT edges by 79.9% over the basic ILP formulation, leading to a substantial speedup. For example, it can reduce the runtimes for the test cases from more than one day to only seconds.

Published in:

Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on  (Volume:30 ,  Issue: 2 )

Date of Publication:

Feb. 2011

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.