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Fabrication of polymer cantilever integrated full-bridge as a piezoresistive sensor

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2 Author(s)
Jun-Hyung Ahn ; Grad. Sch. of Mech. Eng., Chonnam Nat. Univ., Gwang-Ju, South Korea ; Dong-Weon Lee

In this study, we describe the design and fabrication of polymer (SU-8) cantilever with integrated Full-bridge strain sensor. Changes in the surface stress on the SU-8 cantilever are detected by integrated Au strain sensors. Results showed that the full-bridge integrated SU-8 cantilever provides much higher sensitivity than those of conventional type cantilever. The fabricated SU-8 cantilever having the spring constant os 0.2N/m showed a maximum resonance frequency value 5KHZ.

Published in:

Sensors, 2010 IEEE

Date of Conference:

1-4 Nov. 2010