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Design and analysis of a novel electro-optical MEMS gyroscope for navigation applications

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7 Author(s)
Richard Waters ; Advanced Circuits and Sensors Branch, Space and Naval Warfare System Center Pacific (SSC Pacific), San Diego, CA, USA ; Charles Tally ; Brian Dick ; Hugo Jazo
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A novel gyroscope design is presented that has potential to reach navigation-grade performance, i.e. bias instability <; 0.01 °/hr and Angle Random Walk (ARW) <; 0.001 °/√hr. The design is based on the incorporation of an optical transduction mechanism used to decouple drive and sense signals, a dual crystalline silicon spring fabrication approach along with a large drive mass and small sense mass to enhance Coriolis displacement.

Published in:

Sensors, 2010 IEEE

Date of Conference:

1-4 Nov. 2010