By Topic

Dispersion and mirror transmission characteristics of bulk acoustic wave resonators

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Kimmo Kokkonen ; Department of Applied Physics at Aalto University School of Science and Technology ; Tuomas Pensala ; Matti Kaivola

A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited in a 932-MHz solidly mounted ZnO thin-film BAW resonator. The sample is manufactured on a glass substrate, which also allows direct measurement of the vibration fields from the bottom of the acoustic mirror. Vibration fields are measured both on top of the resonator and at the mirror-substrate interface in a frequency range of 350 to 1200 MHz. Plate wave dispersion diagrams are calculated from the experimental data in both cases and the transmission characteristics of the acoustic mirror are determined as a function of both frequency and lateral wave number. The experimental data are compared with 1-D and 2-D simulations to evaluate the validity of the modeling tools commonly used in mirror design. All the major features observed in the 1-D model are identified in the measured dispersion diagrams, and the mirror transmission characteristics predicted for the longitudinal waves, by both the 1-D and the 2-D models, match the measured values well.

Published in:

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control  (Volume:58 ,  Issue: 1 )