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A 1.3- monolithically integrated light source for metro area 100-Gb/s Ethernet is developed. Four 25-Gb/s electroabsorption modulators integrated with distributed-feedback lasers and their multiplexer are monolithically integrated on one chip. A shallow ridge waveguide is used for lasers and modulators for large modulation bandwidth, and a deep ridge waveguide is used for the multiplexer region due to its low bending and radiation losses. The integration of hetero-waveguide devices enables the very small chip size of 22.6 . With the device, 100-Gb/s (4 25-Gb/s simultaneous) operation is demonstrated with the clear eye-openings, and error-free 40-km single-mode fiber transmission is achieved for the first time.