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First-Order Elastic Nonlinearities of Bulk Acoustic Wave Resonators

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9 Author(s)
Collado, C. ; Dept. of Signal Theor. & Commun., Univ. Politec. de Catalunya (UPC), Barcelona, Spain ; Rocas, E. ; Padilla, A. ; Mateu, J.
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We propose a procedure to characterize the intrinsic nonlinearities of bulk acoustic wave resonators by performing one-port measurements of the second harmonic and second-order intermodulation spurious signals. Closed-form expressions have been derived that relate the nonlinear stiffened elasticity with experimental observables. These formulas are valid in a wide range of frequencies around the resonance and have been verified with nonlinear circuit simulations. The measurement setup and its effects are also discussed in our approach. Measurements of a set of aluminum nitride-based devices from several manufacturers yield consistent model parameters and allow us to obtain a coefficient of the nonlinear stiffened elasticity intrinsic to this piezoelectric material.

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:59 ,  Issue: 5 )