Referenced Items are not available for this document.
We propose a procedure to characterize the intrinsic nonlinearities of bulk acoustic wave resonators by performing one-port measurements of the second harmonic and second-order intermodulation spurious signals. Closed-form expressions have been derived that relate the nonlinear stiffened elasticity with experimental observables. These formulas are valid in a wide range of frequencies around the resonance and have been verified with nonlinear circuit simulations. The measurement setup and its effects are also discussed in our approach. Measurements of a set of aluminum nitride-based devices from several manufacturers yield consistent model parameters and allow us to obtain a coefficient of the nonlinear stiffened elasticity intrinsic to this piezoelectric material.
Published in:
Microwave Theory and Techniques, IEEE Transactions on
(Volume:59
,
Issue:
5
)
Date of Publication: May 2011
- Page(s):
- 1206 - 1213
- ISSN :
- 0018-9480
- INSPEC Accession Number:
- 11976131
- Digital Object Identifier :
- 10.1109/TMTT.2010.2098042
- Product Type:
- Journals & Magazines
- Date of Publication :
- 13 January 2011
- Date of Current Version :
- 10 May 2011
- Issue Date :
- May 2011
- Sponsored by :
- IEEE Microwave Theory and Techniques Society
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