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Application of Micromachined Y -Cut-Quartz Bulk Acoustic Wave Resonator for Infrared Sensing

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4 Author(s)
Pisani, M.B. ; Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA ; Ren, Kailiang ; Ping Kao ; Tadigadapa, S.

This paper presents the design, fabrication, and characterization of thermal infrared (IR) imaging arrays operating at room temperature which are based on Y-cut-quartz bulk acoustic wave resonators. A novel method of tracking the resonance frequency based upon the measurement of impedance is presented. High-frequency (240-MHz) micromachined resonators from Y-cut-quartz crystal cuts were fabricated using heterogeneous integration techniques on a silicon wafer. A temperature sensitivity of 22.16 kHz/°C was experimentally measured. IR measurements on the resonator pixel resulted in a noise equivalent power of 3.90 nW/Hz1/2, a detectivity D* of 1 × 105 cm · Hz1/2/W, and a noise equivalent temperature difference of 4 mK in the 8- to 14-μm wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability in video-rate uncooled IR imaging. This work represents the first comprehensive thermal characterization of micromachined F-cut-quartz resonators and their IR sensing response.

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Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 1 )