By Topic

The Compensation for Hysteresis of Silicon Piezoresistive Pressure Sensor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Yang Chuan ; Dept. of Mech. Eng., Xi''an Jiaotong Univ., Xi''an, China ; Li Chen

The aim of this paper is to examine compensating for the hysteresis error of silicon pressure sensor in order to improve the sensor accuracy. The object of investigation is large-range diffused silicon piezoresistive pressure sensors in the industrial field, based on MEMS technology. Due to the complex hysteresis characteristic of the sensor and difficulties in compensation, there are currently no published precedents in relevant studies. The author has analyzed the causation and impacting factors of the hysteresis characteristic and demonstrated, through experiment, that the silicon pressure sensor does satisfy the necessary and sufficient conditions of the general Preisach model. Through utilizing the Preisach model of the sensor and compensating for the hysteresis error using the compensation algorithm on inverse general Preisach model, the experiment has demonstrated that the hysteresis error decreases significantly after compensation, hence enhancing the precision of the sensors.

Published in:

Sensors Journal, IEEE  (Volume:11 ,  Issue: 9 )