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3D fabrication of waveguide and grating coupler in SU-8 by optimized gray scale electron beam lithography

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4 Author(s)
Lin Dong ; Royal Institute of Technology, Division of Optics, SE-164 40 Kista, Sweden ; Srinivasan Iyer ; Sergei Popov ; Ari Friberg

Gray scale electron beam lithography is optimized for simple and accurate prototyping of 3D waveguides and grating output couplers in SU-8. Gratings with complex profiles and free of lag effect can be realized with this technique.

Published in:

Asia Communications and Photonics Conference and Exhibition

Date of Conference:

8-12 Dec. 2010