By Topic

3D fabrication of waveguide and grating coupler in SU-8 by optimized gray scale electron beam lithography

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Lin Dong ; Div. of Opt., R. Inst. of Technol., Kista, Sweden ; Iyer, S. ; Popov, S. ; Friberg, A.

Gray scale electron beam lithography is optimized for simple and accurate prototyping of 3D waveguides and grating output couplers in SU-8. Gratings with complex profiles and free of lag effect can be realized with this technique.

Published in:

Communications and Photonics Conference and Exhibition (ACP), 2010 Asia

Date of Conference:

8-12 Dec. 2010