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3D fabrication of waveguide and grating coupler in SU-8 by optimized gray scale electron beam lithography

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4 Author(s)
Lin Dong ; Div. of Opt., R. Inst. of Technol., Kista, Sweden ; Iyer, S. ; Popov, S. ; Friberg, A.

Gray scale electron beam lithography is optimized for simple and accurate prototyping of 3D waveguides and grating output couplers in SU-8. Gratings with complex profiles and free of lag effect can be realized with this technique.

Published in:

Communications and Photonics Conference and Exhibition (ACP), 2010 Asia

Date of Conference:

8-12 Dec. 2010

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