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Magnetic, Mechanical, and Optical Characterization of a Magnetic Nanoparticle-Embedded Polymer for Microactuation

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8 Author(s)
Tsai, K.L. ; Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA ; Ziaei-Moayyed, M. ; Candler, R.N. ; Wei Hu
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We have characterized the magnetic, mechanical, and optical properties of SU-8 polymer with embedded nickel nanoparticles (SU8-Ni) of concentrations ranging from 0% to 12.5% Ni by weight. Magnetic characterization was performed using a micropolysilicon torsional actuator as well as via alternating gradient magnetometry. Mechanical properties were measured using nanoindentation, and optical measurements were acquired via spectrophotometry. This magnetic polymer offers several advantages as a micromechanical structural material, including biocompatibility, chemical resistance, thermal stability, low cost, and mechanical compliance for large deflections. It is suitable for fluidics and biomedical applications where remote low-power actuation is desired.

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Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 1 )