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Active microcantilevers based on piezoresistive ferromagnetic thin films

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6 Author(s)
Bhaskaran, Harish ; Department of Electrical Engineering, Yale University, New Haven, Connecticut 06511, USA ; Li, Mo ; Garcia-Sanchez, Daniel ; Zhao, Peng
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We report the piezoresistivity in magnetic thin films of Fe0.7Ga0.3 and their use for fabricating self-transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive properties of Fe0.7Ga0.3 thin films, while the deflection readout is achieved by exploiting the piezoresistivity of these films. This self-sensing self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated cantilever-based sensors.

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Applied Physics Letters  (Volume:98 ,  Issue: 1 )