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Gate length of 1-μm enhancement-mode n-channel GaN MOSFET with MgO and hybrid MgO-TiO2 stacked gate dielectrics were characterized. The leakage current of a stacked MgO and hybrid MgO-TiO2 MOS capacitor can be as low as 6.2 × 10-9 and 6.9 × 10-9 A/cm2 at ±1-V bias, respectively. Through a self-aligned process, superior ID-VD and ID-VG electrical characteristics of a MOSFET were obtained. The maximum drain current is 3.69 × 10-5 A/μm at a gate voltage Vg of 8 V and a drain voltage VD of 10 V. The subthreshold swing is 342 mV/dec, and the ION/IOFF is 5.7 × 104.