Cart (Loading....) | Create Account
Close category search window
 

Design of a Time-Based Micro-g Accelerometer

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Dias, R.A. ; Inst. for Nanostruct., Nanomodeling & Nanofabrication, Univ. of Minho, Guimaraes, Portugal ; Mol, L. ; Wolffenbuttel, R.F. ; Cretu, E.
more authors

Closed-loop pull-in time operated devices are a good alternative for high sensitivity accelerometers. This paper proposes the use of time measurement as the transduction mechanism for the realization of a high-precision accelerometer. The key feature is the existence of a metastable region that dominates pull-in behavior, thus making pull-in time very sensitive to external accelerations. The main design challenges for a pull-in time parallel-plate capacitive microelectromechanical system (MEMS) accelerometer are related to the damping and the associated tradeoff between sensitivity and noise is discussed. Parallel-plate MEMS structures designed and fabricated in a 25 μm-thick SOI micromachining process (SOIMUMPS) are used to demonstrate the accelerometer time-based approach and experimental results demonstrate a sensitivity of 0.25 μs/μg.

Published in:

Sensors Journal, IEEE  (Volume:11 ,  Issue: 8 )

Date of Publication:

Aug. 2011

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.