Structural and Optical Properties of Nonpolar
ZnO Films Grown by Plasma-Assisted Molecular-Beam Epitaxy
Structural and optical properties of ZnO epilayers grown on r -plane sapphire substrates by plasma-assisted molecular-beam epitaxy have been investigated using various techniques. A high-purity wurtzite structure and a smooth surface with an a-plane orientation were obtained. The resonant Raman scattering spectra show a typical multiphonon vibration characteristic from wurtzite ZnO. A good near band gap luminescence property is revealed in photoluminescence spectra.
Published in:
Plasma Science, IEEE Transactions on
(Volume:39
,
Issue:
2
)
Date of Publication: Feb. 2011