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YBa2Cu3O7-x (YBCO) superconducting films can be used for microwave applications due to their low surface resistance. Both LaAlO3 and Al2O3 can be considered as applicable substrates since their excellent properties for the preparation of high-quality YBCO films and for the design of microwave elements. In order to optimize the annealing temperature, the microstructure and properties were investigated for YBCO/LaAlO3 and YBCO/CeO2/r-cut Al2O3 films prepared by trifluoroacetates metal organic deposition (TFA-MOD). The results show that the annealing temperature window is broader for YBCO films on LaAlO3 substrates; while, the window is relative narrower for YBCO films on CeO2/Al2O3 substrates. The reasons were also discussed. The surface resistivity (Rs) was measured for the samples with highest critical current density (Jc). The results will provide useful information about processing effects on YBCO films using TFA-MOD for microwave applications.