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Optical scanning with MEMS in-plane vibratory gratings and its applications

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5 Author(s)
Guangya Zhou ; Dept. of Mechanical Engineering, National University of Singapore ; Yu Du ; Kelvin K. L. Cheo ; Hongbin Yu
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MEMS optical scanners are highly desired due to their low-power, high-speed scanning. The in-plane vibratory grating scanner is a development in this area which possesses several unique features. The in-plane scanning minimizes the dynamic deformation, allowing for higher-resolution displays. The dispersive element permits splitting the incoming beam into its constituents for analysis and imaging. Coupling a grating platform to an in-plane moving structure is useful for real-time motion measurement which would otherwise be difficult to analyze. These applications are described including a recent development in the structural design of a double-layer layout which further improves the performance of the grating scanner.

Published in:

2010 International Conference on Optical MEMS and Nanophotonics

Date of Conference:

9-12 Aug. 2010