By Topic

Translatory MEMS actuator with extraordinary large stroke for optical path length modulation

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Thilo Sandner ; Fraunhofer Institute for Photonic Microsystems (IPMS), Grenzstr. 28, D-01109 Dresden ; Thomas Grasshoff ; Harald Schenk

A translatory MOEMS actuator with extraordinary large stroke-especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers-is presented for the first time. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1 mm is realized by means of a new suspension design of the comparative large mirror plate with 19.6 mm2 aperture using four pantographs. The MOEMS device is driven electrostatically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 500 Hz amplitude has been measured in vacuum of 50 Pa and 90 V driving voltage.

Published in:

2010 International Conference on Optical MEMS and Nanophotonics

Date of Conference:

9-12 Aug. 2010